ロボティクス・メカトロニクス講演会講演概要集
Online ISSN : 2424-3124
セッションID: 1A2-C02(1)
会議情報
1A2-C02(1) ガラスナノ・マイクロ加工の表面特性への影響(ナノ・マイクロ流体システム)
古賀 洋介佐藤 洋平菱田 公一三木 則尚
著者情報
会議録・要旨集 フリー

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抄録
Research of biochemical analysis system using micro/nano flow channel and fluid device has been ongoing actively. In micro/nano flow channel, effect of surface condition is larger than that of normal scale. Thus, physical or chemical characteristics such as surface roughness, zeta potential largely affect a system. In this paper, we used hydrofluoric acid, plasma dry etching and machining to etch glass surface. We measured the relation between time and etching depth, and successfully indicated the relation between etching depth and surface roughness or zeta potential.
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© 2011 一般社団法人 日本機械学会
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