抄録
Research of biochemical analysis system using micro/nano flow channel and fluid device has been ongoing actively. In micro/nano flow channel, effect of surface condition is larger than that of normal scale. Thus, physical or chemical characteristics such as surface roughness, zeta potential largely affect a system. In this paper, we used hydrofluoric acid, plasma dry etching and machining to etch glass surface. We measured the relation between time and etching depth, and successfully indicated the relation between etching depth and surface roughness or zeta potential.
