ロボティクス・メカトロニクス講演会講演概要集
Online ISSN : 2424-3124
セッションID: 1P2-X09
会議情報
1P2-X09 光・ひずみ複合MEMSセンサを用いた近接覚・触覚マルチモーダル計測(触覚と力覚(2))
野沢 瑛斗横山 輔久登金島 岳奥山 雅則安部 隆野間 春生東 輝明寒川 雅之
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会議録・要旨集 フリー

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抄録
A multifunctional MEMS sensor for measurement of proximity and touch of an object has been fabricated and characterized. The DC resistance changes linearly to indentation distance of the object. On the other hand, the AC (> 500 kHz) impedance increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. An error of proximity measurement induced by environmental temperature and illuminance has been characterized. The error was estimated at 1 mm for 1℃ temperature change and at 2 mm for 500 lx illuminance change, respectively, and they are enough low in stable environment. Moreover, the AC impedance was different between grounding and floating the proximate object because of difference of distribution of electricstatic field between electrodes, so that it is suggested that proximity can be measured as the impedance change by light as well as electrostatic field.
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© 2014 一般社団法人 日本機械学会
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