抄録
In recent years, micro hand is required in the medical field. A soft actuator driven by fluid power is suitable for miniaturization and has flexibility. A micro pump which can realize high pressure required to drive soft micro actuator which has high actuating force. This paper investigates high pressure ECF micro pump for hydraulic power source. ECF (Electro Conjugate Fluid) is a kind of dielectric and functional fluid generating a strong jet flow when the electrodes in ECF are applied high DC voltage. For a high pressure, electrode pairs are serially cascaded. High pressure ECF micro pump was fabricated by MEMS technology and investigated. The experimental results showed that the fabricated serially cascaded ECF micro pump whose size is 10 mm×10 mm×1 mm is capable of reaching a pressure of 300 kPa.
