光ファイバーを用いたマルチスケール・マルチデプス造形法の開発と応用

抄録

In this study, we propose and demonstrate multi-scale, multi-depth three-dimensional (3D) lithography using multiple optical fibers for microfluidic applications. In this method, 3D molds for replicating microchannels are fabricated by non-focused laser beam thorough the optical fibers immersed into a droplet of photopolymer. Line width was adjustable from 1 to 980 μm using eight kinds of optical fibers with different core diameters. The height of the fabricated line can be also adjustable by controlling the distance between the tip of the optical fiber and substrate. The surface roughness of a single line and plane were measured and evaluated. In addition, the method was used to fabricate 3D molds for the production of polydimethylsiloxane (PDMS) microchannels. The multi-scale, multi-depth 3D lithography will be a rapid, flexible tool for producing PDMS microfluidic devices.