PID制御に対するパルス入力を用いたガルバノミラーの高速ラスタ走査手法

―高速移動によるモーションブラーの補償撮像に向けて―

抄録

PID control decreases gain of high-accelerated input signal against actual signal of actuators due to inertia of its weight. Particularly, in tracking application of galvanometer mirror, its gain decrease causes motion blur as the target speed does not correspond with tracking speed. While in this research we realize to generate high linearity waveform using pulse input into the PID control box. Pulse input generates maximum acceleration of galvanometer, hence we utilized it for generating raster scan. Experimentally, the improvement of waveform and image quality applied for motion-blur compensation was confirmed when the target moves at the speed of 11 km/h.