微粒子励振型制御三方弁を用いたシリンダの位置制御

抄録

Many fluidic control components are required for the multiple-degree-of-freedom mechanisms of a robot using hydraulic actuators. As a result, the volume of fluidic control system tends to increase. Therefore, the compact and lightweight fluidic control components are required. In order to reduce the size of the fluid control system, the control of a fluid actuator using a three-way valve driven by a single piezoelectric vibrator was fabricated by integrating two particle excitation control valves. In addition, position control experiment was performed using a cylinder as the drive target. The cylinder has been successfully controlled by controlling the driving frequency and applied voltage for the control valve.