機械学習を用いたポンプの状態診断技術の開発

抄録

A breakdown of product machine caused a huge loss due to the stop of production line of semiconductor or FPD. Therefore, failure prediction of a machine is expected to decrease downtime at the factory. In this paper, we are developing the monitoring software to predict the failure of bearings in the pumps with machine learning model. And we reported the method of collecting data for machine learning and evaluation results of the monitoring software.