マイクロビームセンサによる微量液体の熱伝導率測定

抄録

We have proposed a simple method for measuring thermal conductivity of gases and liquids using a micro-beam MEMS sensor that is a ~10-μm long free-standing membrane suspended across a trench on a silicon substrate. In this study, we fabricated a device that has a mini-channel to supply a liquid to the sensor. Using this device, the thermal conductivity of FC-72 and ethanol was successfully measured with samples of only 30 μL.