微小片持ちはりのタッピングによる表面機械特性の推定と識別

抄録

This paper proposes an estimation method of mechanical properties in microscopic area using tapping with a micro-cantilever. Resonance frequency and amplitude of the cantilever change depending on the mechanical properties of the material tapped. In this paper, oscillating cantilever and viscoelastic specimen were modeled by mass-spring system with damper and their transient behavior during tapping was simulated. In experiments, different materials were tapped with cantilevers of which length is 1.28mm and the original resonant frequency is 31.77kHz, and the shift of resonant frequency and amplitude in tapping were measured. The simulation results were fitted on experimental results and the equivalent properties were estimated by model parameters. The fitting results coincided qualitatively with the actual ones.