Secondary ion mass spectrometry (SIMS) provides very sensitive chemical and elemental information. Nano dimensional SIMS analysis is, however, very difficult to carry out by conventional methods mainly because of the primary beam diameter and vibrations. Using the latest technology for fine beam formation, we intended to develop a nano-scale FIB (Focused Ion Beam) SIMS. For the purpose of achieving nano-scale spatial resolution, we observed the influence of vibrations that deteriorate spatial resolution. In order to minimize the influence, sample was mounted on the end cap of FIB column directly. Under the condition, the ion induced secondary electron image of a vacuum-evaporated Au film on a carbon plate was obtained with nano-scale image resolution. By eliminating the influence of vibrations, measurements with nano-scale dimensions became possible. Use of the FIB column, which produces over 10 A/cm2 beam density, will realize a new local analytical method.
