陽極酸化技術の液晶ディスプレイへの応用

抄録

Anodization technology used in LCDs (Liquid Crystal Displays) is reviewed. The wet anodization process has an advantage over other dry processes to produce thin oxide films with very smooth surface and less pinholes. Aluminum or its alloy gate lines used in some TFT (Thin Film Transistor)-LCDs are covered with anodic oxide thin films to prevent their hillock formation and corrosion. On the other hand, anodic oxide films of tantalum or its alloys are also used as an insulator of non-linear switching elements in TFD (Thin Film Diode)-LCDs. Anodization is carried out in aqueous or nonaqueous electrolyte solutions. However, only limited electrolyte solutions have been used for manufacturing TFT-LCDs. Here, we introduce our recent results on the anodization of sputtered Al-Nd alloy films in ethylene glycol - based nonaqueous electrolyte solutions.