The secondary ion mass spectrometry (SIMS) is a surface analysis technique in wihch a test specimen is bombarded with accelerated ions and secondary ions are extracted from the sputtered particles with an electric field and analyzed with a mass spectrometer. The basic configuration of the SIMS instrument, the fundamental reaction of the secondary ion formation and applications to various materials are shown.
The glow discharge emission spectrometry (GDS) is another surface analysis technique in which a test specimen is sputtered with ions formed by a glow discharge, the sputtered particle is excited within a plasma of the discharge, and the light emitted during the transition from the excited state to the ground state is analyzed spectrometrically. The basic configuration of the GDS instrument, the fundamental reaction of the glow discharge emission and applications are shown.
