真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
形状記憶合金駆動素子を用いた大口径コンパクトゲートバルブ
西川 雅弘吉川 和博
著者情報
ジャーナル フリー

1997 年 40 巻 8 号 p. 643-649

詳細
抄録
The compact large gate valve has been newly devised using a reversible SMA driving element. The vacuum boundary is set by the aluminum sheet, which is rolled around two cylinders, one of which is located on either side of the valve. When the SMA driver is heated, the SMA shrinks through the inverse martensitic transformation and the sheet retainer rises and fastens the aluminum sheet. When the SMA driver is cooled, the SMA re-expands to the original shape and releases the aluminum sheet.
This conceptual valve is designed and proven for compactness for use with all metal structures. The fundamental performance characteristics of the SMA gate valve are investigated to obtain good vacuum sealing.
著者関連情報
© 日本真空協会
前の記事 次の記事
feedback
Top