Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
高温斜め蒸着による金属ナノウィスカの気相成長
鈴木 基史
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ジャーナル フリー

2009 年 52 巻 4 号 p. 197-201

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抄録
  We demonstrate the growth of unusual metal nanowhiskers by glancing angle deposition on a high temperature (HT-GLAD) substrate, while the usual nanocolumnar structures completely disappear due to accelerated surface diffusion. HT-GLAD is essential for the nucleation of the nanowhiskers and efficient supply of metal atoms on the side surface of the vertically growing nanowhiskers. HT-GLAD will, for the first time, reveal the mechanisms for the vapor growth of metal whiskers and be useful to produce high-quality metal nanowires for novel device elements.
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© 2009 一般社団法人日本真空学会
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