Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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サファイア基板上に成長した ZnO ナノロッド成長機構の面方位依存性
奥村 竜二廣芝 伸哉市川 洋
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2014 年 57 巻 5 号 p. 179-181

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  ZnO nanorods were synthesized on ZnO seed layer covered sapphire substrates with different orientations by hydrothermal method. The surface morphologies of ZnO seed layer were analyzed by atomic force microscope. The shapes of ZnO nanorods were characterized by scanning electron microscopy. The c-axis oriented ZnO nanorods along surface normal were synthesized on A-plane and C-plane sapphire substrates. While, ZnO nanorods grown on R-plane sapphire were slant to the substrate and crossed each other.

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