Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
速報
熱陰極電離真空計の感度係数のガス種依存のシミュレーション
杉沼 茂実平田 正紘小畠 時彦
著者情報
ジャーナル フリー

2016 年 59 巻 6 号 p. 156-159

詳細
抄録

 The relative sensitivity coefficient of B-A gauge in references and the value obtained by the simulation using finite element method were compared. The change in relative sensitivity coefficient of Ar around 1.2 or 1.3 and that of He around 0.15 or 0.16 are thought within the range which is explained by the potential difference between the grid and the filament. The relative sensitivity coefficient of Ar as low as 1.1 and that of He as high as 0.22 may have been measured in high pressure nearby 1 Pa. It is necessary to measure and use the relative sensitivity coefficient of B-A gauge considering about the pressure range.

著者関連情報
© 2016 一般社団法人日本真空学会
前の記事
feedback
Top