Creating a vacuum is to pump gas molecules in a vacuum chamber. Since outgassing properties of chamber walls and vacuum parts are of critical importance for vacuum technology, knowledge on the interaction of molecules with solid surfaces is required. We review properties of typical molecules familiar to vacuum technology and their interaction with well-defined solid surfaces.
The relative sensitivity coefficient of B-A gauge in references and the value obtained by the simulation using finite element method were compared. The change in relative sensitivity coefficient of Ar around 1.2 or 1.3 and that of He around 0.15 or 0.16 are thought within the range which is explained by the potential difference between the grid and the filament. The relative sensitivity coefficient of Ar as low as 1.1 and that of He as high as 0.22 may have been measured in high pressure nearby 1 Pa. It is necessary to measure and use the relative sensitivity coefficient of B-A gauge considering about the pressure range.