3次元マイクロ光造形法の最近の進展

抄録

In recent years, microstereolithography techniques have been used to fabricate various types of three-dimensional micro/nano devices such as microelectromechanical systems, micro total analysis systems and photonic crystals. Two-photon microstereolithography is one of the most promising methods in microstereolithography. This paper describes the fabrication principle, a fabrication system and the latest experimental results of two-photon microstereolithography. In addition, several applications of two-photon microstereolithography, including optically driven micromachines and photonic crystals, are introduced. Two-photon microstereolithography is useful for not only micro/nano technologies but also biotechnologies.