6D planar magnetic levitation system - PIMag 6D

抄録

The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of sensors and coils to control all six degrees of freedom what keeps the system simple and makes it very effective. Furthermore the measurement system and the actuators are completely located below the slider; hence the platform is freely accessible from above and does not need any wiring connection since only passive parts as permanent magnets and grid plates are placed in the moved part of the platform.