2013 年 25 巻 1 号 p. 19-24
In this study, we investigated the effects of H2 gas addition on electrical and optical properties of a RF capacitive atmospheric pressure non-equilibrium Ar plasma jet. It was found that the discharge behavior of the plasma jet was scarcely changed with the addition of H2 gas. However, the discharge current decreased when trace of H2 gas was added into the Ar plasma jet. In respect of optical emission spectrum (OES), the emission intensities of excited Ar atoms increased significantly after the addition of trace of H2 gas. On the contrary, an expected quenching effect of H2 gas was not observed. Based on the electrical and optical characterizations, chemical reactions in Ar-H2 plasma jet were proposed.
