Journal of the Magnetics Society of Japan
Online ISSN : 1882-2932
Print ISSN : 1882-2924
ISSN-L : 1882-2924
計測・高周波デバイス
CoNbZr薄膜を用いた平面型磁界センサによる心磁界計測
大友 祐一薮上 信加藤 和夫小澤 哲也荒井 賢一
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ジャーナル オープンアクセス

2009 年 33 巻 3 号 p. 283-286

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We developed a very sensitive high-frequency carrier-type magnetic-field sensor with a sub-pT resolution using a transmission-line-type sensor. Meander-type sensor elements using amorphous CoNbZr films (4μm in thickness), Cu conductor with a meander pattern (30 mm in length, 1.0 mm in width, 18 μm in thickness), and a ground plane were fabricated. We obtained a magnetic field resolution of 9.1×10-13 T/Hz1/2 at 1 Hz. The detectable magnetic field was limited by the 1/f noise. We detected a magnetocardiogram (MCG) signal of heartbeats with the sensor.

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© 2009 (社)日本磁気学会
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