FeCo-MgFナノグラニュラーTMR薄膜の加熱による膜構造変化

抄録

  We have investigated the thermal change of the structure of FeCo-MgF nano-granular TMR films used for high sensitivity magnetic sensor GIGS. As a result, the grain size of MgF₂ crystals that form intergranule increases with increasing of heating temperature, and it is thought that electric resistivity of these films increases by this structural change. Furthermore, FeCo granules grow and joins together partially over 543K. Films magnetism changes from super paramagnetism to ferromagnetism with this structural change. It is thought that magnetic change is the reason MR ratio decreases.