抄録
A review has been made on studies of the chemical analysis of semiconductors mostly conducted during the last few years. The chemical analysis involves the quantitative and quantitative analysis of impurities, three dimensional distribution of impurities and composition determination in compound semiconductors. These studies employed such methods as radio-activation analysis, nuclear reaction analysis, ion back scattering, electron probe microanalysis, Auger electron spectroscopy, spark source mass spectroscopy, ion microprobe analysis and optical spectroscopies. Finally, a brief summary has been made on the analysis of nonstoichio-metry.
