抄録
The liquid phase epitaxial growth technique to obtain numbers of high quality garnet films with closely controlled magnetic properties is discussed.
The growth of uniform films with a low density of magnetic defects is performed under the axial rotation of substrate with optimum rotation speed and by using a carefully cleaned substrate.
In order to suppress the fluctuation of bubble properties, the growth temperature and time for the next run are modulated quickly using the bubble collapse field and film thickness of the grown film.
By this technique, the bubble properties of 30 mm dia. SmY-garnet films grown in succession in a 768g melt are controlled within ±1% with a reproducibility of more than 65%.