抄録
ZnO films were fabricated from isopropanol solutions of zinc acetate, which were prepared with addition of various kinds of organic modifier(s). The examined organic modifiers were monoethanolamine(MEA), diethanolamine(DEA), acetol, acetoin, and hydrazine. Among the additives, MEA and DEA, and co-addition of acetoin and MEA, as well as acetol and hydrazine, made it possible to prepare transparent solutions for film deposition. The films were coated by a dip-coating procedure and heated at 600oC. The substrates used were heat resistant glass and silicon wafer with oxidized layer. The films from MEA modified solution showed a preferred orientation with c-axis perpendicular to the substrate and the surface of the film was rather rough forming veins. The surface of the films from the solution with co-addition of MEA and acetoin was uniform and ZnO grains showed c-axis orientation.
