Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Experimental Study of Improved Nano-imprint Process by using SU-8 3000NIL Resist
Toshiyuki Ono, Nao Honda, Satoshi Mori, Yoshihiko Kono, Atsushi Sekiguchi
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Keywords: MEMS, Nano-imprint, SU-8, chemically amplified negative resist
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2006 Volume 19 Issue 3 Pages 393-396

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© 2006 The Society of Photopolymer Science and Technology (SPST)
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