Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Adsorption of Micro Tip on Various Surface Energy Substrates
Akira KawaiTakashi YamajiHiroshi Horiguchi
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2008 Volume 21 Issue 1 Pages 85-89

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Abstract
Interaction in liquid medium has been focused for analyzing pattern development, pattern plating, wet etching and cleaning. Adsorption forces due to surface energy of a micro tip and various inorganic substrates can be measured in liquid environment. Hamaker constant between two surfaces is determined based on Lifshitz theory. In liquid condition, Hamaker constant in this system is proportional to adhesion force between the tip and substrates. Experimental value of Hamaker constant indicates good agreement with that of theoretical one.
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© 2008 The Society of Photopolymer Science and Technology (SPST)
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