Preparation of DLC Thin Films by Plasma Polymerization and Their Dielectric Properties

抄録

Diamondlike carbon (DLC) thin film was prepared by the plasma polymerization of H₂/CH₄ on Al plate for an application to a dielectric electrode in clinical bioelectric measurements. The DLC films obtained had a high dielectric constant of as high as 12 and very low dielectric loss of about 0.03-0.06, which indicated that they worked as capacitors. The DLC films also had excellent mechanical properties, great hardness, adhesivity, and durability, although their thickness is only around 10nm. The barrier property of the DLC films against a physiological salt solution was also satisfactory. In the simulation measurement of electrocardiogram, an oscillated signal passed through the DLC film with a physiological salt solution was detected by a synchroscope with an advance of π/2 as in the theory. A possibility of the use of the DLC film for the application to clinical bioelectric measurements was suggested.