抄録
Crystallization of amorphous calcium phosphate (Ca-P) coating on Ti substrate has been investigated by Fourier transform infrared absorption spectroscopy and transmission electron microscopy (TEM). High resolution TEM was also used to elucidate crystal structure of the crystallized grains. The Ca-P coating on Ti substrate was performed by radio frequency magnetron sputtering of a sintered hydroxyapatite (HAp) target. As-sputtered Ca-P coating having 1.95 of Ca/P ratio was amorphous. Annealing the as-sputtered amorphous coating at 600°C resulted in crystallization of the coating. Crystallized coating mainly consisted of tetracalcium phosphate (TTCP) and HAp grains. Grain sizes of TTCP and HAp were about 10-100 nm in diameter. CaO grains were also observed only near surface of annealed coating.