Microstructures driving by Photothermal Effect

Abstract

A micro–cantilever, which is the most simple element of micromachine, is driven by the photothermal effect using a modulated laser diode. Previous study, nanometer order of displacement was obtained by driving of steel micro–cantilever. In this study, employ structure to bilayer of aluminum and photoresist and improving fabrication method of a cantilever, micrometer order of displacement was measured. Micromotion was excited on the bimetal microstructure of arch form by using periodic laser irradiation.