主催: The Japan Society for Precision Engineering
Development of a novel tandem low-coherence interferometer to calibrate the gauge block without wringing onto platen is now in progress. The use of tandem low-coherence interferometer eliminates the confusion due to fringe-order ambiguity, but shape variations of interference fringe′s envelope due to some disturbances such as vibration and temperature fluctuations give difficulties on peak selection. We improve a tandem low-coherence interferometer to increase a signal-to-noise ratio (SNR), so interference fringe signals are less affected by disturbances. The interferometric system consists of a combination between Michelson and Fizeau interferometers which are connected by using a single mode optical fiber. The new setup provides better envelope shape of low-coherence interference signal and makes easier peak selection. As the result we can determine fringe order without ambiguity.
