2011 JSPE Spring Conference
Session ID : G13
Conference information
Host: The Japan Society for Precision Engineering
Damage-free planarization of 2-inch 4H-SiC Substrate utilizing Fe abrasive particles
*Akihisa Kubota, Muasahiko Yoshimura, Yuya Ichimori, Yoshitaka Nakanishi, Mutsumi Touge
Author information
Keywords:
SiC
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