抄録
In order to fabricate 3-D microstructures in a wider area and a higher precision for flat display panels, fuel cells and etc., development of large-scale ultra-precision lathes is strongly demanded. As the fabrication accuracy is influenced by the slide motion error, measurement of the slide error is an important issue. To improve the reliability of the measurement, it is necessary to measure the slide error with respect to axis of the spindle. This paper reports the measurement results of the slide error of a large-scale ultra-precision machine with a travel range of 1.7 m.
