精密工学会学術講演会講演論文集
2011年度精密工学会春季大会
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微細金型の精密研磨に関する研究
変位拡大機構型圧電アクチュエータを利用した2軸振動研磨装置の開発
*徐 世傑鈴木 浩文岡田 睦吉田 和史林 偉民矢野 健樋口 俊郎
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Demands of precision molds with complicated microstructures for digital devices, μ-TAS and etc. are increasing [1]. The structured molds must be polished after grinding or cutting in order to improve the surface roughness. In this report, a two dimensional low frequency vibration (2DLFV) polishing actuator using PZT is proposed and developed. The 2DLFV consists of 4 MechaTrans, a multiplayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a center piece. Mechanical transformer is a kind of flexure hinges structured that magnifies the stroke of the multiplayer stacked piezoelectric actuator around 7 times to 120 μm. With this actuation, the tool vibrates in a circle trajectory to achieve polishing effect [2]. In the polishing experiments, tungsten carbide molds (work pieces) are polished with diamond slurry. The surface roughness of the work pieces and polishing efficiency are evaluated. From the experimental results, we found low frequency vibration especially 2DLFV is a useful micro polishing system for micro structured mold.

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