抄録
Since the nanotechnology and ultra precision engineering have progressed rapidly, a reduction of the rotating error for the metrology and manufacturing fields is required. The error motion of a spindle can be classified into the radial, angular and axial error motions. To identify the total error motion, it is necessary to accurately measure the error motion components simultaneously. Conventionally, the measurement of 5-degree-of-freedom error motions is carried out using precision artifacts (for example, double ball bar or kinematic ball bar) and displacement sensors. These reference artifacts have many problems such as large, heavy and complicated structure to have the possibility of inhibiting the original rotational motion of the spindle. This paper describes the optical interferometer system is proposed in order to solve the measurement problems. The goal of this study is to measure the radial, axial and angular error motion of spindle concurrently by using concentric circle grating and interferometers. By using three optical sensors placed at appropriate position of the grating, the vertical and lateral displacements of grating can be measured, then the radial, axial and angular error motions of the spindle can be determined.
