抄録
The two-dimensional (2-D) atomic encoder method using the regular crystalline lattice and the scanning tunnelling microscope has been developed by our laboratory. The application of the method for the direct measurement of the spindle radial motion error was proposed. At this stage, we have developed the system which can obtain image of atoms on the crystalline surface during the spindle rotation. The construction of the measurement system and the preliminary experimental results are presented in this article.
