抄録
This paper is a third report of a new measurement method for Coordinate Measuring Machine (CMM) verification. The diagonal measurements of a CMM were done by the proposed measuring system. The repetition rate of an optical comb (C-Fiber Femtosecond Laser, Menlo Systems) was modified by a Fabry-Pérot fiber etalon to a repetition frequency of 1-GHz. Then, a compact single-mode fiber pulsed interferometer has been developed. The proposed measuring system is connected to a laser source through an optical fiber of about 100 m. The ball lens with the refractive index of 2 was used as the target, which acts as a retroreflector. Subsequently, diagonal directions of a medium-size CMM (FALCIO APEX 707, Mitutoyo) were measured by this system. The measurement results are within the maximum permissible error of indication of a CMM for size measurement (MPEE), which the measurement uncertainty is approximately 0.6 μm. This method is very convenient comparing with artifact method.
