抄録
Contact detection process of ultra-precision surfaces fabrication and form measurement by using a force sensor-integrated fast tool servo will cause the surface damages of a copper workpiece. Based on the study of contact deformation, nanoindentation test is carried out by MD simulation in this paper to theoretically investigate the surface damages due to the contact detection process. Mechanical behaviors of the molecules on the copper workpiece surface during nanoindentation process are observed. In addition, the physical properties of the workpiece are also analyzed in this paper.
