精密工学会学術講演会講演論文集
2019年度精密工学会秋季大会
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Study on Organic Fibers in The Polishing Pad for Sapphire Chemical Mechanical Polishing
*Chansatarpornkul Sansuwanカチョーンルンルアン パナート鈴木 恵友
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p. 18-19

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Chemical mechanical polishing (CMP) is an essential process in the manufacturing of sapphire substrate that needs to achieve a smooth planar surface without subsurface damage. Definitely, the polishing pad is one of the dominant factors in the polishing. In recent years, there are trends to decrease the synthases material that formed by chemical production for our world environment. The organic fibers are having uniform structure, easy to fabricate from the natural or waste product from agro-industry or food industry, and can be control the diameter from micro unit until nano size such as cellulose nanofibers. This study aims to developed polishing pad with organic polishing pad from the several kinds of fibers such as; bamboo, sugarcane bagasse, banana, and pineapple fibers. As a result, naturally SiO2-contained fiber types that were bamboo and bagasse, performed considerably higher material removal rate (MRR) more than a conventional pad by 157% and 191% respectively. On the other hand, none-SiO2 fiber type (banana, pineapple) did not perform MRR completely. Therefore, we conclude that the SiO2 in the organic fibers could improve a material removal rate of sapphire CMP.

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