Real Time, Flexible RF Sputtered ZnO Thin Film CO₂ Sensor

抄録

In this research, we aimed to fabricate RF (Radio Frequency) sputtered ZnO thin film based CO₂ sensor for monitoring concentrations of carbon dioxide. Carbon dioxide is a non-toxic and harmless gas in small proportions, but excessive amounts may lead to many harmful effects. Harms to nature include greenhouse effect, ocean acidification, suffocation in humans and animals, disturbances in natural cycles, etc. Due to rapid increase in quantities of this odorless and colorless gas during industrial accidents, volcanic eruptions or gas leakages, etc., researchers demand a novel materials for detecting CO₂ in atmosphere. Moreover CO₂ identification from exhaled breath also contains information about respiratory problems. Towards this goal, we deposited nanostructured ZnO thin film on Au/Ti interdigitated electrodes using RF sputtering technique. The deposited ZnO thin film was characterized for its structural, morphological and topographical studies. Room temperature CO₂ sensing studies were performed to check the ability of the deposited ZnO thin films.