3D profile measurement of a cylindrical surface with a multi-beam angle sensor

抄録

To investigate the application of the multi-beam angle sensor (MBAS) for a high-precision optical aspheric or freeform surface, which is the major part of an optical system, in this paper, we present a method of aspheric surface reconstruction from angle data through the use of the MBAS. The MBAS is based on a multi-autocollimator system with a microlens array, which can split the beam into several spots and can convert the centroid detection of the light intensity into angle measurement. Compared with other methods, the MBAS was designed to address the curvature-range problem circumferential scan and it automatically eliminates the tilt error caused by the rotation of a workpiece. Using the tracking technique, the MBAS can automatically determine the position of the focal spots from the centroid measurement of the light intensity, which is directly related to the accuracy of the angle measurement. The experimental results confirmed the feasibility of the MBAS for the 3D surface profile measurement of a cylindrical surface.