主催: 公益社団法人精密工学会
会議名: 2022年度精密工学会秋季大会
開催地: オンライン開催
開催日: 2022/09/07 - 2022/09/09
p. 232-233
In recent years, nano metal structures have been in the center of considerable attention due to their unique optical phenomenon and potential applications in the field of medical and optics. However, some disadvantages, including low efficiency, high cost and inconvenience, are still existing in present fabrication methods. To solve these problems, a method which utilizes evanescent wave to trap the nanoparticles on the grating surface simultaneously with vibration of grating to fabricate nano structures was proposed. By changing the parameters which depend on evanescent wave and vibration of grating in experiments, the nano metal particles will form into different structures. The fabricated processes reported in this method are less than the other present methods. With these characteristics, the method processed in this research largely simplifies the fabricating process of nano metal structures and improve the processing efficiency.