精密工学会学術講演会講演論文集
2022年度精密工学会秋季大会
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The fabrication of nano metal structures through evanescent wave combined with vibration (The second report)
The trapping effect of incident light on metal nano particles
*SHI YUCHEN水谷 康弘浦 直樹川上 恭平上野原 努牧浦 良彦高谷 裕浩
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p. 232-233

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In recent years, nano metal structures have been in the center of considerable attention due to their unique optical phenomenon and potential applications in the field of medical and optics. However, some disadvantages, including low efficiency, high cost and inconvenience, are still existing in present fabrication methods. To solve these problems, a method which utilizes evanescent wave to trap the nanoparticles on the grating surface simultaneously with vibration of grating to fabricate nano structures was proposed. By changing the parameters which depend on evanescent wave and vibration of grating in experiments, the nano metal particles will form into different structures. The fabricated processes reported in this method are less than the other present methods. With these characteristics, the method processed in this research largely simplifies the fabricating process of nano metal structures and improve the processing efficiency.

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