Microstructures are widely used in the manufacture of functional surfaces. By manipulation of the microgroove shape, we can design planar high-numerical-aperture lenses and reflectors, where the phase retardance effect of the designed structure is important. However, this complex phenomenon involves many parameters such as polarization and wavelength of illumination, period, filling factor, and depth of the structure. The phase retardance behavior of periodic microgroove structure is discussed based on FDTD analysis and analytical approaches.
