Synthesis of ILQ Control System for Disturbance Attenuation and Its application to Thermal Control of a Plasma CVD Reactor

Abstract

In this paper, we present a new servo design method for disturbance attenuation based on Inverse Linear Quadratic (ILQ) servo mechanism, which was provided and developed by the first author and his colleagues. To obtain this method, the existing frequency- shaping ILQ servo system with observer based residual feedback is specialized for disturbance attenuation. By suitable design of the residual feedback controller, we show that a desired disturbance rejection and output tracking can be achieved asymptotically as the ILQ tuning parameters go to infinity. Finally, the design method obtained is applied to temperature control of a chamber in Plasma CVD Reactor.