表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
研究論文
コバルトと鉄の積層膜を触媒とした単層カーボンナノチューブの低温成長
石川 豊齋藤 駿介及川 朱
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ジャーナル フリー

2021 年 72 巻 9 号 p. 499-502

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This study examined growth of single-walled carbon nanotubes (SWCNTs) by hot-filament chemical vapor deposition at low temperatures using a double-layer film consisting of iron and cobalt layers as a catalyst. Ethanol was used as the carbon source. At a 350 ℃ growth temperature, few SWCNTs were grown when only cobalt film was used as the catalyst, although SWCNT growth was confirmed when a double-layer film consisting of iron and cobalt layers was used as the catalyst. The optimal combination for use as the catalyst is iron oxide in a layer (thickness before oxidation, 1.2 nm) on the cobalt oxide in a layer (thickness before oxidation, 1.0 nm). By reduction of these films at 400 ℃ for 30 min, followed by CNT growth at 350 ℃ for 30 min, a vertically aligned SWCNT film with 3.2 μm thickness was obtained.

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