研究論文
大電力パルススパッタリングを用いた有機基板へのダイヤモンドライクカーボン成膜
キーワード:
High Power Impulse Magnetron Sputtering,
Diamond-Like Carbon,
Organic Substrate,
Mass Spectrometry
2022 年 73 巻 1 号 p. 47-52
詳細
2022 年 73 巻 1 号 p. 47-52
Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC films on PTFE or PA6 substrates were greater than those on POM substrate. The ion energy distribution functions（IEDFs）of carbon ion and argon ion were measured using energy-resolved mass spectrometry to evaluate high-energy ion production. From HiPIMS, high-energy carbon ion with more than 30 eV was detected, whereas argon ions were distributed in the low-energy region. Comparison of the IEDFs of carbon and argon ions in HiPIMS to those obtained using direct current magnetron sputtering confirmed that higher-energy carbon ions, which contribute to increased sp3 bonding, were produced with higher intensity in HiPIMS.
