CO2/H2O Gas Sensor with a MEMS Fabry-Perot Filter

Makoto Noro; Kentaro Suzuki; Naoki Kishi; Hitoshi Hara; Tetsuya Watanabe; Hideto Iwaoka

doi:10.11499/sicep.2002.0.308.0

SICE Annual Conference 2002

DOI https://doi.org/10.11499/sicep.2002.0.308.0

会議情報

主催: The Society of Instrument and Control Engineers

共催: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society

CO2/H2O Gas Sensor with a MEMS Fabry-Perot Filter

Makoto Noro, Kentaro Suzuki, Naoki Kishi, Hitoshi Hara, Tetsuya Watanabe, Hideto Iwaoka

著者情報

キーワード: Fabry-Perot Filter, NDIR, gas sensor

会議録・要旨集フリー

p. 308

詳細

抄録

An electrostatically driven tunable MEMS Fabry-Perot Filter with wide wavelength range from 2.5μm to 4.5μm has been developed for NDIR CO₂/H₂O gas sensors. The Fabry-Perot Filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.

責任著者(Corresponding author)

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