抄録
In the flowing quantity instrumentation, it has been attracted various sensors using the technology of MEMS. A product excellent as for the cost performance came to be supplied by this situation. We thought it paid attention to the pitot type flow meter in the difference pressure type. In this time, we used these high performance pressure sensors and tried to measure the flow rate. In this repot, it introduces the measurement principle of this flow meter. And the basic characteristics of flow rate are confirmed through the experiments. In addition, some matters are considered based on these results, and the possibility of this meter is referred.
