SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Optimization of the Gate Insulator Studied by Hard x-ray Photoelectron Spectroscopy for Future CMOS Graphene Channel
Daiyu Kondo, Kenjiro Hayashi, Junichi Yamaguchi, Shintaro Sato, Naoki Yokoyama
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Keywords: CMOS, 2011B1984, BL46XU
JOURNAL OPEN ACCESS

2015 Volume 3 Issue 2 Pages 461-463

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[in Japanese]
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