SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section B
Strain Analysis of Silicon Surface Layer by Highly-parallel-X-ray Diffraction
Tomoyuki Horikawa, Takeshi Senda, Hiroyuki Fujimori, Yoshiyuki Tsusaka, Junji Matsui
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Keywords: 2014A3265, BL24XU
JOURNAL OPEN ACCESS

2020 Volume 8 Issue 2 Pages 346-349

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Abstract
[in Japanese]
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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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